In this paper, The brand new lapping slurry and sprucing slurry are launched. As well as deliquescence degree of CLBO is fallen to cheapest. A brand new working technological know-how can also be adopted. After rough polishing, the concentration of ultra-precision polishing slurry is elevated effectively. So does the extremely-precision sprucing velocity, plus the wiping velocity is quicker than the deliquescence pace. The CLBO crystal surface area roughness can obtain 1nm and keep the surface high quality nicely. Access by your institution

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We summarized the current growth status on the higher-power DUV laser the two with the wavelength of FHG with the one-μm laser and at 193 nm. The current progress of your reliable-point out/fiber laser, plus the nonlinear optical crystals, prompts not only the common electrical power but also the beam quality (coherence) on the DUV lasers to an unprecedented degree.

As an example, the current concave OC could get replaced by a aircraft mirror which could mitigate the facility density about the surface area of M1 along with the diamond. Additionally, employing significant hurt threshold coatings for M1 and diamond would also improve the output ability with no damages. Then, the NIR laser on the 2nd Stokes wavelength can be large adequate, and its excellent beam high quality, to crank out the final DUV laser at 193 nm using a significant average electrical power.

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The development of the 193-nm laser was demonstrated by phases of SFG. To be able to scale the DUV laser ability effectively, a completely new notion of the 193-nm DUV laser technology is presented depending on the diamond Raman laser.